Semiconductor pellicle company FST is set to acquire additional carbon nanotube (CNT) pellicle production equipment from Finland's Canatu. This move is seen as a preparation to increase production capacity for CNT pellicles to be used in Samsung Electronics' 2-nanometer (nm) foundry process. Analysts suggest that the CNT pellicle business is transitioning from technology development to mass production.
According to investment banking sources on August 25, FST has placed an order for the CNT100 SEMI equipment from Canatu for CNT pellicle production. This order follows a previous order for long-lead time items placed earlier this year. After securing long-lead components, FST has now ordered the main equipment, marking a significant investment to ramp up CNT pellicle production.
Canatu reported that the total contract amount, including the previously ordered long-lead items, exceeds €5 million (approximately 80 billion won). Revenue from technology royalties and consumable sales is not included in this figure. The equipment is expected to be delivered to FST in 2027.
The CNT100 SEMI is essential for producing CNT membranes, the core material for CNT pellicles. FST is developing CNT pellicles for extreme ultraviolet (EUV) processes using Canatu's equipment and technology.
A pellicle is a thin film used to protect masks from dust and other contaminants during semiconductor circuit patterning. As semiconductor circuits become smaller, even minor contaminants can lead to defects, increasing the importance of pellicles. In particular, EUV processes require pellicles that can withstand strong light while allowing it to pass through effectively. CNT pellicles, made from carbon nanotubes in a thin film form, are noted for their high light transmittance and heat resistance.
The collaboration between FST and Canatu has gradually expanded with a focus on mass production. Canatu supplied the first CNT100 SEMI equipment to FST in September 2024, and the equipment and post-processing facilities received customer approval in July of the previous year. In October of last year, Canatu granted FST a commercial production license for CNT pellicles. Following the initial order for necessary components earlier this year, FST has now placed an order for the main equipment. Canatu also stated that this order is aimed at increasing FST's CNT pellicle production capacity.
This investment is particularly noteworthy as it aligns with Samsung Electronics' preparations for mass production of its 2nm foundry process. FST has been jointly developing CNT pellicles with Samsung, which invested approximately 43 billion won in FST in 2021 to acquire a stake in the company.
Additionally, FST has reportedly secured orders for EUV pellicle-related equipment for Samsung's foundry in Taylor, Texas. This includes equipment for automatic pellicle attachment and detachment (EPMD), pellicle membrane and frame contamination inspection (EPIS), and transport container inspection (EPODIS). These pieces of equipment are essential for using CNT pellicles in Samsung's production lines.
With the addition of Canatu's equipment necessary for CNT pellicle production, FST's production and equipment capabilities are expected to expand. Industry experts believe that FST is preparing to increase CNT pellicle production in line with Samsung's expansion of its 2nm production.
Maximilian Slawinski, CEO of Canatu, stated that this order demonstrates ongoing trust in CNT technology and production equipment, while also reaffirming the market opportunities for CNT pellicles in advanced semiconductor manufacturing.
* This article has been translated by AI.
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