China has unveiled a prototype of the light source system, a key component of extreme ultraviolet (EUV) lithography equipment essential for advanced semiconductor production.
The semiconductor light source developer, Langdao Suiyan, first showcased the EUV light source prototype at the 26th China International Industry Fair in Shanghai, which began on October 12, according to a report by the state-run Global Times on October 15. A representative at the event stated that the system has a domestic production rate of 90% and that most of its core components were developed in-house.
EUV light sources are critical technologies needed for manufacturing advanced semiconductors with a wavelength of less than 7 nanometers. The process involves firing high-powered lasers at tin droplets to create plasma, which generates extreme ultraviolet light at a wavelength of 13.5 nanometers. The light source is a core component of EUV lithography equipment, alongside precision reflective optics, masks, and wafer transport and alignment systems.
Langdao Suiyan's light source system employs a laser-produced plasma (LPP) method, similar to that used by Dutch company ASML in its commercial EUV lithography equipment. The company revealed that its low-power light source system, 'FlintNano LPP-OXXO,' has an EUV output of over 15W and can operate continuously for more than 100 hours. In contrast, ASML's commercial EUV lithography equipment typically requires light source outputs in the hundreds of watts. Improvements in output, long-term stability, and operational efficiency are necessary for industrial application.
A representative at the fair noted, "It will take an additional 3 to 5 years for this light source system to reach mass production." This unveiling is seen as significant, marking China's advancement from theoretical research to prototype validation in EUV light source technology.
Founded in 2024, Langdao Suiyan was established by a research team led by Dr. Wang Hao, based on plasma research achievements from Tsinghua University. The company has secured investments from Zhangjiang Hi-Tech Park and Zhongxin Juyuan.
* This article has been translated by AI.
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