China has successfully localized the development of immersion DUV (deep ultraviolet) lithography equipment, with the manufacturer identified as Ai Sheng Na, established in Shanghai.
According to Reuters, citing anonymous sources, the state-owned Ai Sheng Na Electronic Technology Group is recruiting experts in lithography to produce immersion DUV systems.
Founded in August 2023, Ai Sheng Na has a capital of 7 billion yuan (approximately $1.5 billion). Shanghai Micro Electronics Equipment (SMEE) and the Shanghai International Trust, both state-owned enterprises, each hold a 50% stake in the company. Ai Sheng Na has reportedly recruited development teams from SMEE and Yuliangsheng, both of which are involved in lithography equipment development. Yuliangsheng is considered a subsidiary of the semiconductor equipment company, Sinokairai, which is affiliated with Huawei.
This establishment of Ai Sheng Na and the integration of development teams from SMEE and Yuliangsheng are seen as efforts by China to accelerate the development of DUV equipment at a national level.
Earlier, U.S. tech outlet The Information reported on July 28 that a Chinese semiconductor equipment company is producing immersion DUV systems, planning to ship five units this year and 20 units next year, although the company's name was not disclosed.
If China's production of immersion DUV systems is confirmed, it would mark a historic technological breakthrough. Associate Professor Fu Fangjian from Singapore Management University stated in an interview with the United Daily News that this could be a significant breakthrough for China in overcoming U.S. technological pressures.
Additionally, Zhang Pan, founder of Advantage Research Consulting based in Singapore, noted, "If China successfully produces DUV systems, it will only be a matter of time before it breaks through 7-nanometer semiconductor process technology. Accelerating the development of lithography technology could pose a substantial threat to the U.S.-led global semiconductor ecosystem."
* This article has been translated by AI.
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